With the advent of a new method for accurately measuring power demand and output, the commercial application of micro-electromechanical systems (MEMS) will increase significantly. At the "Technical International Conference 2013" held today, the French National Metrology and Testing Laboratory (LNE) will introduce this simple and inexpensive technology. Researchers believe it will help global MEMS manufacturers improve product performance, develop new functions, reduce energy consumption for mass production, respond to market demands for miniaturization and improve reliability.
MEMS are very small devices that can be used to drive sensors remotely to measure changes in the physical environment, such as force, light, or motion, or in turn MEMS act as a brake to convert energy changes into motion. MEMS size usually ranges from 20m to 1mm, and is composed of devices that interact with the external environment (such as micro sensors) and data processing units for information decision-making.
The current applications of MEMS are very wide, including: accelerometers in car airbags, which can quickly detect the negative acceleration of vehicles; inkjet printer heads, which can form images by accurately positioning tiny droplets on paper; smart phone collars Motion sensor.
Although MEMS has been commercialized in the above fields for 50 years, it still does not meet people's expectations, partly because of a lack of understanding of the potential power requirements and output of these small devices. Because MEMS must be embedded in a protective wafer package, there is no way to access its content mechanical structure, which is difficult for MEMS developers or users to understand how to best use their products.
In order to solve this problem, Dr. Bounouh of LNE of France and his colleagues have developed a brand new experimental device, which can obtain accurate information of MEMS mechanical parameters through electrical measurement. LNE is one of the 7 national research centers in Europe participating in the "Energy Harvesting Metrology" project, which is funded by the European Commission through the "European Metrology Research Program" (EMRP). Used for energy harvesting products and materials.
The researchers analyzed the harmonic content of the output voltage of the device using the current and changing frequency of the device, supplemented by additional calculations, and obtained the characteristic parameters of the MEMS mechanical structure, including the damping factor (which has a negative impact on vibration) and the maximum power (Originating from MEMS mechanical vibration) The decisive frequency.
Dr. Bounouh said, "This is a very simple and fast measurement method, because all you do is connect the MEMS to two wires, power up and then sample the output signal. This method does not require large investment and can be easily Expand to large energy collectors measuring micro and macro scales. "
LNE has tested some MEMS devices using this technology, and their mechanical resonance frequency measurement still has slight uncertainty. Dr. Bounouh and his colleagues believe that this technology will provide feedback on production methods in the future and will allow manufacturers to design MEMS for specific needs. More accurate information on device output and power requirements will also influence the device selection of potential users, who will be able to select optimized devices that just meet the needs.
Dr. Bounouh added, "Our technology enables online production test and measurement, which can provide EU companies with a key competitive advantage. The introduction of metrology principles into industrial processes contributes to high-yield mass production.
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